In-plane displacement detection with picometer accuracy on a conventional microscope

J Kokorian, F Buja, WM van Spengen

Research output: Contribution to journalArticleScientificpeer-review

22 Citations (Scopus)
Original languageEnglish
Pages (from-to)618-625
JournalIEEE Journal of Microelectromechanical Systems
Volume24
Issue number3
DOIs
Publication statusPublished - 2015

Keywords

  • CWTS 0.75 <= JFIS < 2.00

Cite this