In-plane positioning of flexible silicon-dioxide photonic waveguides

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Abstract

This paper describes the design, fabrication and characterization of an in-plane positioning system within a thick (16 micrometers) silicon dioxide photonic-material stack. This is part of a proposed novel photonic alignment scheme, targeting at highly-automated assembly and high-precision alignment of multi-port photonic chips. Creating such functionality in thick silicon dioxide is challenging because of its low coefficient of thermal expansion, as well as the stresses present in the material. A design is proposed which addresses both challenges, and which in fact makes positive use of the present stress. The in-plane positioning system combines an electrothermal chevron actuator and a lever mechanism, aiming to achieve several micrometer displacement. The lever structure is proposed to amplify the motion of the chevron actuator. The shuttle of the chevron actuator and the lever are provided with a set of hooks. The hooks engage during the fabrication of the structure, because of the stress-induced retraction of the chevron actuator. With this design, a robust fabrication yield was achieved. The characterization work includes analyzing the engagement between the hook and chevron actuator, and the in-plane displacement with the lever enhancement.

Original languageEnglish
Title of host publicationProceedings International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017
EditorsD. Popa, S. Haliyo
Place of PublicationPiscataway, NJ, USA
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Number of pages6
ISBN (Electronic)9781538603468
DOIs
Publication statusPublished - 2017
Event1st International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017 - Montreal, Canada
Duration: 17 Jul 201721 Jul 2017

Conference

Conference1st International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017
CountryCanada
CityMontreal
Period17/07/1721/07/17

Keywords

  • Actuators
  • Optical Waveguides
  • Silicon
  • Fabrication
  • Photonics
  • Etching
  • Micromechanical devices

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