In-Plane Thermal Unimorph Using Confined Polymers

GK Lau, T Chu Duc, JFL Goosen, F van Keulen, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Abstract

This paper presents a novel design of an electrothermally actuated unimorph, consisting of a metallic heater, a heat conducting structure of asymmetric shape, and thermally expandable polymer. The polymer is confined by the thermal conducting structure of large depth, in order to improve heat transfer as well as to enhance thermal expansion in a desired direction. A 500 µm long, 50 µm thick, micro-fabricated actuator of the proposed design is experimentally demonstrated with a large deflection of almost 25 µm at 1.75 V.
Original languageUndefined/Unknown
Title of host publicationTechnical Digest 17th MicroMechanics Europe
Editors Morgan, H.
Place of PublicationSouthampton
PublisherUniversity of Southampton
Pages117-120
Number of pages4
ISBN (Print)0854328483
Publication statusPublished - 2006
Event17th MicroMechanics Europe - Southampton
Duration: 3 Sept 20065 Sept 2006

Publication series

Name
PublisherUniversity of Southampton

Conference

Conference17th MicroMechanics Europe
Period3/09/065/09/06

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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