In situ characterisation of CVD processes by Raman Scattering: Determination of the kinetics of the hydrogen reduction of WF6

TGM Oosterlaken

Research output: ThesisDissertation (TU Delft)

Original languageUndefined/Unknown
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
  • Radelaar, S, Supervisor
Award date1 Jan 1800
Place of PublicationDelft
Publication statusPublished - 1996

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