In-situ doped PECVD SiC for surface micromachined devices

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationEurosensors XVI 16th European Conference on Solid-State Transducers
EditorsJ Saneistr, P Ripka
Place of PublicationPraha, Czech Republik
PublisherCzech Technical University
Pages232-235
Number of pages4
Publication statusPublished - 2002
EventEurosensors XVI, Praha, Czech Republik - Praha, Czech Republik
Duration: 15 Sep 200218 Sep 2002

Publication series

Name
PublisherCzech Technical University

Conference

ConferenceEurosensors XVI, Praha, Czech Republik
Period15/09/0218/09/02

Keywords

  • Conf.proc. > 3 pag

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