In-situ isotropic and anisotropic DRIE sequence for massive parallel multistage Brownian ratchets

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

3 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProc. Transducers 2007 Conference
EditorsG Delapierre, R Puers
Place of PublicationLyon, France
PublisherIEEE Society
Pages497-500
Number of pages4
ISBN (Print)1-4244-0842-3
Publication statusPublished - 2007

Publication series

Name
PublisherIEEE

Keywords

  • Elektrotechniek
  • Techniek
  • conference contrib. refereed
  • Conf.proc. > 3 pag

Cite this

Pham, HTM., de Boer, CR., Wei, J., & Sarro, PM. (2007). In-situ isotropic and anisotropic DRIE sequence for massive parallel multistage Brownian ratchets. In G. Delapierre, & R. Puers (Eds.), Proc. Transducers 2007 Conference (pp. 497-500). IEEE Society.