In-situ isotropic and anisotropic DRIE sequence for massive parallel multistage Brownian ratchets

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

3 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	Proc. Transducers 2007 Conference
Editors	G Delapierre, R Puers
Place of Publication	Lyon, France
Publisher	IEEE Society
Pages	497-500
Number of pages	4
ISBN (Print)	1-4244-0842-3
Publication status	Published - 2007

Name
Publisher	IEEE

Keywords

@inproceedings{42c95b12f72c405f81d8549477de114c,

title = "In-situ isotropic and anisotropic DRIE sequence for massive parallel multistage Brownian ratchets",

keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",

author = "HTM Pham and {de Boer}, CR and J Wei and PM Sarro",

year = "2007",

language = "Undefined/Unknown",

isbn = "1-4244-0842-3",

publisher = "IEEE Society",

pages = "497--500",

editor = "G Delapierre and R Puers",

booktitle = "Proc. Transducers 2007 Conference",

}

In-situ isotropic and anisotropic DRIE sequence for massive parallel multistage Brownian ratchets. / Pham, HTM; de Boer, CR ; Wei, J et al.
Proc. Transducers 2007 Conference. ed. / G Delapierre; R Puers. Lyon, France: IEEE Society, 2007. p. 497-500.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - In-situ isotropic and anisotropic DRIE sequence for massive parallel multistage Brownian ratchets

AU - Pham, HTM

AU - de Boer, CR

AU - Wei, J

AU - Sarro, PM

PY - 2007

Y1 - 2007

KW - Elektrotechniek

KW - Techniek

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 1-4244-0842-3

SP - 497

EP - 500

BT - Proc. Transducers 2007 Conference

A2 - Delapierre, G

A2 - Puers, R

PB - IEEE Society

CY - Lyon, France

ER -