In-situ mass spectrometry during laser-induced chemical vapor deposition of silicon carbonnitride

G Korevaar, W Besling, APLM Goossens, J Schoonman

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationProceedings of the Twelfth European Conference on Chemical Vapour Deposition (EuroCVD-12)
    EditorsA Figueras
    PublisherEDP Sciences
    Pages763-768
    Number of pages6
    Publication statusPublished - 1999

    Publication series

    Name
    PublisherEDP Sciences France
    NameThe European Physical Journal. Special Topics
    Volume9
    ISSN (Print)1155-4339

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