In-situ mass spectrometry during laser-induced chemical vapor deposition of silicon carbonnitride

G Korevaar, W Besling, APLM Goossens, J Schoonman

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of the Twelfth European Conference on Chemical Vapour Deposition (EuroCVD-12)
Editors	A Figueras
Publisher	EDP Sciences
Pages	763-768
Number of pages	6
Publication status	Published - 1999

Name
Publisher	EDP Sciences France

Name	The European Physical Journal. Special Topics
Volume	9
ISSN (Print)	1155-4339

ISSN: 1155-4339

Cite this

@inproceedings{35fb74a86ee4421aa6f87c2884148b59,

title = "In-situ mass spectrometry during laser-induced chemical vapor deposition of silicon carbonnitride",

author = "G Korevaar and W Besling and APLM Goossens and J Schoonman",

note = "ISSN: 1155-4339",

year = "1999",

language = "Undefined/Unknown",

publisher = "EDP Sciences",

pages = "763--768",

editor = "A Figueras",

booktitle = "Proceedings of the Twelfth European Conference on Chemical Vapour Deposition (EuroCVD-12)",

address = "France",

}

In-situ mass spectrometry during laser-induced chemical vapor deposition of silicon carbonnitride. / Korevaar, G; Besling, W; Goossens, APLM et al.
Proceedings of the Twelfth European Conference on Chemical Vapour Deposition (EuroCVD-12). ed. / A Figueras. EDP Sciences, 1999. p. 763-768 (The European Physical Journal. Special Topics; Vol. 9).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

TY - GEN

T1 - In-situ mass spectrometry during laser-induced chemical vapor deposition of silicon carbonnitride

AU - Korevaar, G

AU - Besling, W

AU - Goossens, APLM

AU - Schoonman, J

N1 - ISSN: 1155-4339

PY - 1999

Y1 - 1999

M3 - Conference contribution

SP - 763

EP - 768

BT - Proceedings of the Twelfth European Conference on Chemical Vapour Deposition (EuroCVD-12)

A2 - Figueras, A

PB - EDP Sciences

ER -