In situ monitoring and control of material growth for high resolution electron beam induced deposition

WF van Dorp, CW Hagen, P. A. Crozier, P Kruit

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	2210-2214
Number of pages	5
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	25
Issue number	6
Publication status	Published - 2007

Keywords

@article{0ce4a0001b7d4606ab125b20af116aea,

title = "In situ monitoring and control of material growth for high resolution electron beam induced deposition",

keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "{van Dorp}, WF and CW Hagen and {A. Crozier}, P. and P Kruit",

year = "2007",

language = "Undefined/Unknown",

volume = "25",

pages = "2210--2214",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "6",

}

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - In situ monitoring and control of material growth for high resolution electron beam induced deposition

AU - van Dorp, WF

AU - Hagen, CW

AU - A. Crozier, P.

AU - Kruit, P

PY - 2007

Y1 - 2007

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

VL - 25

SP - 2210

EP - 2214

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

SN - 1071-1023

IS - 6

ER -