Induced coupled plasma deep reactive ion etching based sensors

G Pandraud; DHB Wicaksono; LB Hebrard; AJL Adam; PJ French

Induced coupled plasma deep reactive ion etching based sensors

G Pandraud, DHB Wicaksono, LB Hebrard, AJL Adam, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of the 16th MME MicroMechanics Europe Workshop
Editors	s.n.
Place of Publication	s.l.
Publisher	s.n.
Pages	68-71
Number of pages	4
ISBN (Print)	91-631-7553-3
Publication status	Published - 2005
Event	16th Workshop on Micromachining, Micromechanics and Microsystems ( MME), Göteborg, Sweden - s.l. Duration: 4 Sept 2005 → 6 Sept 2005

Publication series

Name
Publisher	s.n.

Conference

Conference	16th Workshop on Micromachining, Micromechanics and Microsystems ( MME), Göteborg, Sweden
Period	4/09/05 → 6/09/05

Bibliographical note

Editor onbekend JH

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{ea0230c6abd54adc907ad590a48d2067,

title = "Induced coupled plasma deep reactive ion etching based sensors",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "G Pandraud and DHB Wicaksono and LB Hebrard and AJL Adam and PJ French",

note = "Editor onbekend JH; 16th Workshop on Micromachining, Micromechanics and Microsystems ( MME), G{\"o}teborg, Sweden ; Conference date: 04-09-2005 Through 06-09-2005",

year = "2005",

language = "Undefined/Unknown",

isbn = "91-631-7553-3",

publisher = "s.n.",

pages = "68--71",

editor = "s.n.",

booktitle = "Proceedings of the 16th MME MicroMechanics Europe Workshop",

}

TY - GEN

T1 - Induced coupled plasma deep reactive ion etching based sensors

AU - Pandraud, G

AU - Wicaksono, DHB

AU - Hebrard, LB

AU - Adam, AJL

AU - French, PJ

N1 - Editor onbekend JH

PY - 2005

Y1 - 2005

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 91-631-7553-3

SP - 68

EP - 71

BT - Proceedings of the 16th MME MicroMechanics Europe Workshop

A2 - s.n., null

PB - s.n.

CY - s.l.

T2 - 16th Workshop on Micromachining, Micromechanics and Microsystems ( MME), Göteborg, Sweden

Y2 - 4 September 2005 through 6 September 2005

ER -