Inertial MEMS devices; modeling, design and applications

E Cretu

Research output: ThesisDissertation (TU Delft)

Original languageUndefined/Unknown
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
  • Huijsing, J.H., Supervisor
  • Wolffenbuttel, R.F., Advisor
  • Lang, W, Advisor, External person
  • Mokwa, W, Advisor, External person
  • Bodea, M, Advisor, External person
  • Meijer, G.C.M., Advisor
  • French, P.J., Advisor
Award date7 Oct 2003
Place of Publications.l.
Print ISBNs90-6734-029-4
Publication statusPublished - 2003


  • Diss. prom. aan TU Delft

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