Influence of aperture positon in focussed ion beam systems on statistical Coulomb interaction effects

P Kruit, XR Jiang

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationProceedings SPIE, The International Society for Optical Engineering
    EditorsE Munro
    Number of pages11
    Publication statusPublished - 1996

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