Influence of Coulomb interactions on choice of magnification, aperture size and source brightness in a two lens focused ion beam column

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1635-1641
Number of pages	7
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	B14
Issue number	3
Publication status	Published - 1996

Cite this

@article{15e1c7a1999943fe84115563ab6e4ab6,

title = "Influence of Coulomb interactions on choice of magnification, aperture size and source brightness in a two lens focused ion beam column",

author = "P Kruit and XR Jiang",

year = "1996",

language = "Undefined/Unknown",

volume = "B14",

pages = "1635--1641",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "3",

}

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Influence of Coulomb interactions on choice of magnification, aperture size and source brightness in a two lens focused ion beam column

AU - Kruit, P

AU - Jiang, XR

PY - 1996

Y1 - 1996

M3 - Article

SN - 1071-1023

VL - B14

SP - 1635

EP - 1641

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - 3

ER -