Influence of Coulomb interactions on choice of magnification, aperture size and source brightness in a two lens focused ion beam column

P Kruit, XR Jiang

    Research output: Contribution to journalArticleScientificpeer-review

    14 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)1635-1641
    Number of pages7
    JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
    Issue number3
    Publication statusPublished - 1996

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