Influence of Coulomb Interactions on current density distribution in a two-lens focused ion beam system

J Bi, PWH Jager, JE Barth, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    15 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)249-252
    Number of pages4
    JournalMicroelectronic Engineering
    Volume41/42
    Publication statusPublished - 1998

    Cite this