Original language | Undefined/Unknown |
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Pages (from-to) | 249-252 |
Number of pages | 4 |
Journal | Microelectronic Engineering |
Volume | 41/42 |
Publication status | Published - 1998 |
Influence of Coulomb Interactions on current density distribution in a two-lens focused ion beam system
J Bi, PWH Jager, JE Barth, P Kruit
Research output: Contribution to journal › Article › Scientific › peer-review