Influence of Coulomb Interactions on current density distribution in a two-lens focused ion beam system

J Bi, PWH Jager, JE Barth, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageUndefined/Unknown
    Pages (from-to)249-252
    Number of pages4
    JournalMicroelectronic Engineering
    Volume41/42
    Publication statusPublished - 1998

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