@inproceedings{5ef3813abc0646939cc0a32b185640c1,
title = "Influence of deposition parameter and temperature on stress and strain of in-situ doped PECVD silicon carbide",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "HMT Pham and {de Boer}, CR and PM Sarro",
year = "2001",
language = "Undefined/Unknown",
publisher = "s.n.",
pages = "153--154",
booktitle = "ICSCRM2001: proceedings",
note = "International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan ; Conference date: 28-10-2001 Through 02-11-2001",
}