Influence of depth in helium desorption from cavities induced by 3-He implantation in silicon

R Delamare, E Ntsoenzok, F Labohm, A van Veen

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Name
Publisher	Scitec Public.

Keywords

@inproceedings{561e90b66cea4c3c91f400e8debf8b41,

title = "Influence of depth in helium desorption from cavities induced by 3-He implantation in silicon",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "R Delamare and E Ntsoenzok and F Labohm and {van Veen}, A",

year = "2001",

language = "Undefined/Unknown",

publisher = "Scitec Public.",

pages = "303--308",

booktitle = "Unknown",

}