Influence of ICP etching on surface morphology of InP substrates

F Karouta, EJ Geluk, RW van der Heijden, AYu Silov, T Eijkermans, JJGM van der Tol, MK Smit, HWM Salemink

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    3 Citations (Scopus)
    Original languageUndefined/Unknown
    Title of host publication16th IPRM 2004
    Editors s.n.
    Place of Publications.l.
    Publishers.n.
    Pages322-325
    Number of pages4
    Publication statusPublished - 2004
    EventInternational Conference on Indium Phosphide and Related Materials 2004, Kagoshima, Japan - s.l.
    Duration: 31 May 20044 Jun 2004

    Publication series

    Name
    Publishers.n.

    Conference

    ConferenceInternational Conference on Indium Phosphide and Related Materials 2004, Kagoshima, Japan
    Period31/05/044/06/04

    Keywords

    • academic journal papers
    • Conf.proc. > 3 pag

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