Influence of ICP etching on surface morphology of InP substrates

F Karouta; EJ Geluk; RW van der Heijden; AYu Silov; T Eijkermans; JJGM van der Tol; MK Smit; HWM Salemink

Influence of ICP etching on surface morphology of InP substrates

F Karouta, EJ Geluk, RW van der Heijden, AYu Silov, T Eijkermans, JJGM van der Tol, MK Smit, HWM Salemink

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

3 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	16th IPRM 2004
Editors	s.n.
Place of Publication	s.l.
Publisher	s.n.
Pages	322-325
Number of pages	4
Publication status	Published - 2004
Event	International Conference on Indium Phosphide and Related Materials 2004, Kagoshima, Japan - s.l. Duration: 31 May 2004 → 4 Jun 2004

Publication series

Name
Publisher	s.n.

Conference

Conference	International Conference on Indium Phosphide and Related Materials 2004, Kagoshima, Japan
Period	31/05/04 → 4/06/04

Bibliographical note

nog niet eerder opgevoerd

Keywords

academic journal papers
Conf.proc. > 3 pag

Cite this

@inproceedings{c639f70f834d423e9b99107d629bb2fb,

title = "Influence of ICP etching on surface morphology of InP substrates",

keywords = "academic journal papers, Conf.proc. > 3 pag",

author = "F Karouta and EJ Geluk and {van der Heijden}, RW and AYu Silov and T Eijkermans and {van der Tol}, JJGM and MK Smit and HWM Salemink",

note = "nog niet eerder opgevoerd; International Conference on Indium Phosphide and Related Materials 2004, Kagoshima, Japan ; Conference date: 31-05-2004 Through 04-06-2004",

year = "2004",

language = "Undefined/Unknown",

publisher = "s.n.",

pages = "322--325",

editor = "s.n.",

booktitle = "16th IPRM 2004",

}

TY - GEN

T1 - Influence of ICP etching on surface morphology of InP substrates

AU - Karouta, F

AU - Geluk, EJ

AU - van der Heijden, RW

AU - Silov, AYu

AU - Eijkermans, T

AU - van der Tol, JJGM

AU - Smit, MK

AU - Salemink, HWM

N1 - nog niet eerder opgevoerd

PY - 2004

Y1 - 2004

KW - academic journal papers

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 322

EP - 325

BT - 16th IPRM 2004

A2 - s.n., null

PB - s.n.

CY - s.l.

T2 - International Conference on Indium Phosphide and Related Materials 2004, Kagoshima, Japan

Y2 - 31 May 2004 through 4 June 2004

ER -