Influence of mask induced polarization effects on a pattern printability

Y Aksenov, P. Dirksen, X Wei, P Zandbergen

Research output: Contribution to journalConference articleScientificpeer-review

3 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)576-586
Number of pages11
JournalProceedings of SPIE- International Society for Optical Engineering
Volume5754
Publication statusPublished - 2005

Keywords

  • conference contrib. refereed
  • Peer-lijst tijdschrift

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