@inproceedings{0706f10412ff4b3590dc4a9fa8937089,
title = "Influence of Multilayers on the optical Performance of Extreme Ultra Violet Projection Systems.",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "MF Bal and F Bociort and JJM Braat",
year = "2002",
language = "Undefined/Unknown",
publisher = "SPIE",
pages = "149--158",
editor = "J.M. Sasian and P.K. Manhart",
booktitle = "International Optical Design Conference 2002 Proceeding Vol. 4832",
address = "United States",
}