@inproceedings{31efe276b1534ef698360317bf1bcf96,
title = "Influence of the formation parameters on the humidity sensing characteristics of a capacitive humidity sensor based on porous silicon",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "{O Halloran}, GMO and {van der Vlist}, W and PM Sarro and PJ French",
year = "1999",
language = "Undefined/Unknown",
isbn = "90-76699-02-X",
publisher = "Delft University of Technology",
pages = "117--120",
booktitle = "Eurosensors XIII: proceedings",
address = "Netherlands",
note = "13th European Conference on Solid-State Transducers, The Hague ; Conference date: 12-09-1999 Through 15-09-1999",
}