Influence of the formation parameters on the humidity sensing characteristics of a capacitive humidity sensor based on porous silicon

GMO O Halloran, W van der Vlist, PM Sarro, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationEurosensors XIII: proceedings
Place of PublicationDelft
PublisherDelft University of Technology
Pages117-120
Number of pages4
ISBN (Print)90-76699-02-X
Publication statusPublished - 1999
Event13th European Conference on Solid-State Transducers, The Hague - Delft
Duration: 12 Sep 199915 Sep 1999

Publication series

Name
PublisherDelft University of Technology

Conference

Conference13th European Conference on Solid-State Transducers, The Hague
Period12/09/9915/09/99

Keywords

  • ZX Int.klas.verslagjaar < 2002

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