Influence of the plasma pretreatment of GaAs(100) and Si(100) surfaces on the optical and structural properties of Si3N4/GaAs and a-SiGe/Si interfaces

E Pincik, M Jergel, M Kucera, RACMM Swaaij, J Ivanco, R Senderák, M Zeman, J Müllerová, M Brunel

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)72-76
Number of pages5
JournalApplied Surface Science
Issue number166
Publication statusPublished - 2000


  • ZX Int.klas.verslagjaar < 2002

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