Influence of the plasma pretreatment of GaAs(100) and Si(100) surfaces on the optical and structural properties of Si3N4/GaAs and a-SiGe/Si interfaces

E Pincik; M Jergel; M Kucera; RACMM Swaaij; J Ivanco; R Senderák; M Zeman; J Müllerová; M Brunel

Influence of the plasma pretreatment of GaAs(100) and Si(100) surfaces on the optical and structural properties of Si3N4/GaAs and a-SiGe/Si interfaces

E Pincik, M Jergel, M Kucera, RACMM Swaaij, J Ivanco, R Senderák, M Zeman, J Müllerová, M Brunel

Electronic Components, Technology and Materials

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	72-76
Number of pages	5
Journal	Applied Surface Science
Issue number	166
Publication status	Published - 2000

Keywords

ZX Int.klas.verslagjaar < 2002

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This output contributes to the following UN Sustainable Development Goals (SDGs)

Cite this

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title = "Influence of the plasma pretreatment of GaAs(100) and Si(100) surfaces on the optical and structural properties of Si3N4/GaAs and a-SiGe/Si interfaces",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "E Pincik and M Jergel and M Kucera and RACMM Swaaij and J Ivanco and R Sender{\'a}k and M Zeman and J M{\"u}llerov{\'a} and M Brunel",

year = "2000",

language = "Undefined/Unknown",

pages = "72--76",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "Elsevier",

number = "166",

}

TY - JOUR

T1 - Influence of the plasma pretreatment of GaAs(100) and Si(100) surfaces on the optical and structural properties of Si3N4/GaAs and a-SiGe/Si interfaces

AU - Pincik, E

AU - Jergel, M

AU - Kucera, M

AU - Swaaij, RACMM

AU - Ivanco, J

AU - Senderák, R

AU - Zeman, M

AU - Müllerová, J

AU - Brunel, M

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Article

SN - 0169-4332

SP - 72

EP - 76

JO - Applied Surface Science

JF - Applied Surface Science

IS - 166

ER -