Influence of transparent conductive oxides on passivation of a-Si:H/c-Si heterojunctions as studied by atomic layer deposited Al-doped ZnO

B Macco, D Deligiannis, S Smit, RACMM van Swaaij, M Zeman, WMM Kessels

Research output: Contribution to journal › Article › Scientific › peer-review

45 Citations (Scopus)

Original language	English
Pages (from-to)	1-5
Number of pages	5
Journal	Semiconductor Science and Technology
Volume	29
Issue number	12
DOIs	https://doi.org/10.1088/0268-1242/29/12/122001
Publication status	Published - 2014

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title = "Influence of transparent conductive oxides on passivation of a-Si:H/c-Si heterojunctions as studied by atomic layer deposited Al-doped ZnO",

author = "B Macco and D Deligiannis and S Smit and {van Swaaij}, RACMM and M Zeman and WMM Kessels",

year = "2014",

doi = "10.1088/0268-1242/29/12/122001",

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T1 - Influence of transparent conductive oxides on passivation of a-Si:H/c-Si heterojunctions as studied by atomic layer deposited Al-doped ZnO

AU - Macco, B

AU - Deligiannis, D

AU - Smit, S

AU - van Swaaij, RACMM

AU - Zeman, M

AU - Kessels, WMM

PY - 2014

Y1 - 2014

U2 - 10.1088/0268-1242/29/12/122001

DO - 10.1088/0268-1242/29/12/122001

M3 - Article

SN - 0268-1242

VL - 29

SP - 1

EP - 5

JO - Semiconductor Science and Technology

JF - Semiconductor Science and Technology

IS - 12

ER -