Influences of the capping layer on the grain growth with micro-Czochralski process during excimer-laser crystallization

M He, R Ishihara, Y Hiroshima, S Inoue, T Shimoda

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Journal	Japanese Journal of Applied Physics. Part 2, Letters & Express Lettres
Publication status	Published - 2006

Keywords

@article{3ed0a73a4ef94ca18e2b35feb20870e6,

title = "Influences of the capping layer on the grain growth with micro-Czochralski process during excimer-laser crystallization",

keywords = "academic journal papers, CWTS JFIS < 0.75",

author = "M He and R Ishihara and Y Hiroshima and S Inoue and T Shimoda",

year = "2006",

language = "Undefined/Unknown",

journal = "Japanese Journal of Applied Physics. Part 2, Letters & Express Lettres",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

}

TY - JOUR

T1 - Influences of the capping layer on the grain growth with micro-Czochralski process during excimer-laser crystallization

AU - He, M

AU - Ishihara, R

AU - Hiroshima, Y

AU - Inoue, S

AU - Shimoda, T

PY - 2006

Y1 - 2006

KW - academic journal papers

KW - CWTS JFIS < 0.75

M3 - Article

SN - 0021-4922

JO - Japanese Journal of Applied Physics. Part 2, Letters & Express Lettres

JF - Japanese Journal of Applied Physics. Part 2, Letters & Express Lettres

ER -