Initial pits for electrochemical etching in hydrofluoric acid

H Ohji, PJ French, S Izuo, K Tsutsumi

Research output: Contribution to journalArticleScientificpeer-review

13 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)390-394
Number of pages5
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume85
Publication statusPublished - 2000

Keywords

  • ZX Int.klas.verslagjaar < 2002

Cite this