InP-based waveguides: comparison of ECR plasma etching and wet-chemical etching

JJGM van der Tol; M Silova; F Karouta; RG Broeke; HH Tan; C Jagadish; E Smalbrugge; BH van Roy

InP-based waveguides: comparison of ECR plasma etching and wet-chemical etching

JJGM van der Tol, M Silova, F Karouta, RG Broeke, HH Tan, C Jagadish, E Smalbrugge, BH van Roy

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings
Editors	XJM Leijtens, den JH Besten
Place of Publication	Delft
Publisher	Delft University of Technology
Pages	127-130
Number of pages	4
ISBN (Print)	90-901426-6
Publication status	Published - 2000
Event	2000 IEEE/LEOS Symposium Benelux chapter, Delft - Delft Duration: 30 Oct 2000 → 30 Oct 2000

Publication series

Name
Publisher	Delft University of Technology

Conference

Conference	2000 IEEE/LEOS Symposium Benelux chapter, Delft
Period	30/10/00 → 30/10/00

Keywords

ZX Int.klas.verslagjaar < 2002

Cite this

@inproceedings{5b42756181c0473a8a2f18819dee0196,

title = "InP-based waveguides: comparison of ECR plasma etching and wet-chemical etching",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "{van der Tol}, JJGM and M Silova and F Karouta and RG Broeke and HH Tan and C Jagadish and E Smalbrugge and {van Roy}, BH",

year = "2000",

language = "Undefined/Unknown",

isbn = "90-901426-6",

publisher = "Delft University of Technology",

pages = "127--130",

editor = "{XJM Leijtens} and {JH Besten}, den",

booktitle = "Proceedings",

address = "Netherlands",

note = "2000 IEEE/LEOS Symposium Benelux chapter, Delft ; Conference date: 30-10-2000 Through 30-10-2000",

}

TY - GEN

T1 - InP-based waveguides: comparison of ECR plasma etching and wet-chemical etching

AU - van der Tol, JJGM

AU - Silova, M

AU - Karouta, F

AU - Broeke, RG

AU - Tan, HH

AU - Jagadish, C

AU - Smalbrugge, E

AU - van Roy, BH

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 90-901426-6

SP - 127

EP - 130

BT - Proceedings

A2 - XJM Leijtens, null

A2 - JH Besten, den

PB - Delft University of Technology

CY - Delft

T2 - 2000 IEEE/LEOS Symposium Benelux chapter, Delft

Y2 - 30 October 2000 through 30 October 2000

ER -