InP-based waveguides: comparison of ECR plasma etching and wet-chemical etching

JJGM van der Tol, M Silova, F Karouta, RG Broeke, HH Tan, C Jagadish, E Smalbrugge, BH van Roy

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    Original languageUndefined/Unknown
    Title of host publicationProceedings
    Editors XJM Leijtens, den JH Besten
    Place of PublicationDelft
    PublisherDelft University of Technology
    Pages127-130
    Number of pages4
    ISBN (Print)90-901426-6
    Publication statusPublished - 2000
    Event2000 IEEE/LEOS Symposium Benelux chapter, Delft - Delft
    Duration: 30 Oct 200030 Oct 2000

    Publication series

    Name
    PublisherDelft University of Technology

    Conference

    Conference2000 IEEE/LEOS Symposium Benelux chapter, Delft
    Period30/10/0030/10/00

    Keywords

    • ZX Int.klas.verslagjaar < 2002

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