Inprocess monitoring of grinding and polishing of optical surfaces.

RM van der Bijl, OW Fähnle, H van Brug, JJM Braat

Research output: Contribution to journalArticleScientificpeer-review

15 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)3300-3303
Number of pages4
JournalApplied Optics
Volume39
Issue number16
Publication statusPublished - 2000

Keywords

  • ZX Int.klas.verslagjaar < 2002

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