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Inprocess monitoring of grinding and polishing of optical surfaces.

  • RM van der Bijl
  • , OW Fähnle
  • , H van Brug
  • , JJM Braat

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageUndefined/Unknown
    Pages (from-to)3300-3303
    Number of pages4
    JournalApplied Optics
    Volume39
    Issue number16
    Publication statusPublished - 2000

    Keywords

    • ZX Int.klas.verslagjaar < 2002

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