| Original language | English |
|---|---|
| Patent number | WO 2010/020506 A1 |
| Priority date | 25/02/10 |
| Publication status | Published - 2010 |
Keywords
- Octrooi
Inspection method and apparatus, and lithographic apparatus
JM Kuiper (Inventor)
Research output: Patent
JM Kuiper (Inventor)
Research output: Patent
| Original language | English |
|---|---|
| Patent number | WO 2010/020506 A1 |
| Priority date | 25/02/10 |
| Publication status | Published - 2010 |