Integrated 6-DoF Lorentz Actuator with Gravity Compensation for Vibration Isolation in In-Line Surface Metrology

Ruijun Deng

Research output: Thesis › Dissertation (TU Delft)

1020 Downloads (Pure)

Original language	English
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Munnig Schmidt, Robert, Supervisor Spronck, Jo, Advisor
Award date	11 Sep 2017
Print ISBNs	978-94-6186-833-6
DOIs	https://doi.org/10.4233/uuid:e8590c25-5cfc-43a9-989e-e98b1ea9a8d8
Publication status	Published - 2017

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