Integrated 6-DoF Lorentz Actuator with Gravity Compensation for Vibration Isolation in In-Line Surface Metrology

Ruijun Deng

Research output: ThesisDissertation (TU Delft)

597 Downloads (Pure)
Original languageEnglish
Awarding Institution
  • Delft University of Technology
Supervisors/Advisors
  • Munnig Schmidt, Robert, Supervisor
  • Spronck, J.W., Advisor
Award date11 Sep 2017
Print ISBNs978-94-6186-833-6
DOIs
Publication statusPublished - 2017

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