Integrated 6-DoF Lorentz Actuator with Gravity Compensation for Vibration Isolation in In-Line Surface Metrology

Ruijun Deng

Research output: Thesis › Dissertation (TU Delft)

1679 Downloads (Pure)

Original language	English
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Munnig Schmidt, Robert, Promotor Spronck, J.W., Copromotor
Award date	11 Sept 2017
Print ISBNs	978-94-6186-833-6
DOIs	https://doi.org/10.4233/uuid:e8590c25-5cfc-43a9-989e-e98b1ea9a8d8
Publication status	Published - 2017

Access to Document

@phdthesis{e8590c255cfc43a9989ee98b1ea9a8d8,

title = "Integrated 6-DoF Lorentz Actuator with Gravity Compensation for Vibration Isolation in In-Line Surface Metrology",

author = "Ruijun Deng",

year = "2017",

doi = "10.4233/uuid:e8590c25-5cfc-43a9-989e-e98b1ea9a8d8",

language = "English",

isbn = "978-94-6186-833-6",

type = "Dissertation (TU Delft)",

school = "Delft University of Technology",

}

TY - THES

T1 - Integrated 6-DoF Lorentz Actuator with Gravity Compensation for Vibration Isolation in In-Line Surface Metrology

AU - Deng, Ruijun

PY - 2017

Y1 - 2017

UR - http://resolver.tudelft.nl/uuid:e8590c25-5cfc-43a9-989e-e98b1ea9a8d8

U2 - 10.4233/uuid:e8590c25-5cfc-43a9-989e-e98b1ea9a8d8

DO - 10.4233/uuid:e8590c25-5cfc-43a9-989e-e98b1ea9a8d8

M3 - Dissertation (TU Delft)

SN - 978-94-6186-833-6

ER -