Integrated 64 pixel UV image sensor and readout in a silicon carbide CMOS technology

J. Romijn; S. Vollebregt; L.M. Middelburg; B. el Mansouri; H.W. van Zeijl; Alexander  May; Tobias  Erlbacher; Johan Leijtens; Kouchi Zhang; Pasqualina M Sarro

doi:10.1038/s41378-022-00446-3

Integrated 64 pixel UV image sensor and readout in a silicon carbide CMOS technology

J. Romijn^*, S. Vollebregt, L.M. Middelburg, B. el Mansouri, H.W. van Zeijl, Alexander May, Tobias Erlbacher , Johan Leijtens, Kouchi Zhang, Pasqualina M Sarro

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

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Abstract

This work demonstrates the first on-chip UV optoelectronic integration in 4H-SiC CMOS, which includes an image sensor with 64 active pixels and a total of 1263 transistors on a 100 mm2 chip. The reported image sensor offers serial digital, analog, and 2-bit ADC outputs and operates at 0.39 Hz with a maximum power consumption of 60 μW, which are significant improvements over previous reports. UV optoelectronics have applications in flame detection, satellites, astronomy, UV photography, and healthcare. The complexity of this optoelectronic system paves the way for new applications such harsh environment microcontrollers.

Original language	English
Article number	114
Number of pages	17
Journal	Microsystems & Nanoengineering
Volume	8
Issue number	1
DOIs	https://doi.org/10.1038/s41378-022-00446-3
Publication status	Published - 2022

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s41378-022-00446-3Final published version, 2.61 MBLicence: CC BY

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@article{9d4da9d5685d4be68dbc762b7a5ccbf1,

title = "Integrated 64 pixel UV image sensor and readout in a silicon carbide CMOS technology",

abstract = "This work demonstrates the first on-chip UV optoelectronic integration in 4H-SiC CMOS, which includes an image sensor with 64 active pixels and a total of 1263 transistors on a 100 mm2 chip. The reported image sensor offers serial digital, analog, and 2-bit ADC outputs and operates at 0.39 Hz with a maximum power consumption of 60 μW, which are significant improvements over previous reports. UV optoelectronics have applications in flame detection, satellites, astronomy, UV photography, and healthcare. The complexity of this optoelectronic system paves the way for new applications such harsh environment microcontrollers.",

author = "J. Romijn and S. Vollebregt and L.M. Middelburg and {el Mansouri}, B. and {van Zeijl}, H.W. and Alexander May and Tobias Erlbacher and Johan Leijtens and Kouchi Zhang and Sarro, {Pasqualina M}",

year = "2022",

doi = "10.1038/s41378-022-00446-3",

language = "English",

volume = "8",

journal = "Microsystems & Nanoengineering",

issn = "2096-1030",

publisher = "Nature",

number = "1",

}

TY - JOUR

T1 - Integrated 64 pixel UV image sensor and readout in a silicon carbide CMOS technology

AU - Romijn, J.

AU - Vollebregt, S.

AU - Middelburg, L.M.

AU - el Mansouri, B.

AU - van Zeijl, H.W.

AU - May, Alexander

AU - Erlbacher , Tobias

AU - Leijtens, Johan

AU - Zhang, Kouchi

AU - Sarro, Pasqualina M

PY - 2022

Y1 - 2022

N2 - This work demonstrates the first on-chip UV optoelectronic integration in 4H-SiC CMOS, which includes an image sensor with 64 active pixels and a total of 1263 transistors on a 100 mm2 chip. The reported image sensor offers serial digital, analog, and 2-bit ADC outputs and operates at 0.39 Hz with a maximum power consumption of 60 μW, which are significant improvements over previous reports. UV optoelectronics have applications in flame detection, satellites, astronomy, UV photography, and healthcare. The complexity of this optoelectronic system paves the way for new applications such harsh environment microcontrollers.

AB - This work demonstrates the first on-chip UV optoelectronic integration in 4H-SiC CMOS, which includes an image sensor with 64 active pixels and a total of 1263 transistors on a 100 mm2 chip. The reported image sensor offers serial digital, analog, and 2-bit ADC outputs and operates at 0.39 Hz with a maximum power consumption of 60 μW, which are significant improvements over previous reports. UV optoelectronics have applications in flame detection, satellites, astronomy, UV photography, and healthcare. The complexity of this optoelectronic system paves the way for new applications such harsh environment microcontrollers.

UR - http://www.scopus.com/inward/record.url?scp=85140438738&partnerID=8YFLogxK

U2 - 10.1038/s41378-022-00446-3

DO - 10.1038/s41378-022-00446-3

M3 - Article

SN - 2096-1030

VL - 8

JO - Microsystems & Nanoengineering

JF - Microsystems & Nanoengineering

IS - 1

M1 - 114

ER -

Integrated 64 pixel UV image sensor and readout in a silicon carbide CMOS technology

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