@inproceedings{0e0d3ccc5e1b4e39b782bd2604793de9,
title = "Integrated auto alighment and calibration for high resolution capacitive sensor system",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "{van Schieveen}, JP and JW Spronck and S Nihtianov and {Munnig Schmidt}, RH",
year = "2010",
language = "English",
isbn = "978-0-9553082-8-4",
publisher = "EUSPEN",
pages = "188--191",
editor = "H Spaan and P Shore",
booktitle = "Proceedings of the 10th international conference of the european spciety for precision engineering and nanotechnology",
note = "10th international conference of the european society for precision engineering and nanotechnology ; Conference date: 31-05-2010 Through 04-06-2010",
}