Integrated chip-size antennas for wireless microsystems: Fabrication and design considerations

P Mendes, A Poliakov, M Bartek, JN Burghartz, JH Correia

Research output: Contribution to journalArticleScientificpeer-review

22 Citations (Scopus)


This paper reports on fabrication and design considerations of an integrated folded shorted-patch chip-size antenna for applications in short-range wireless microsystems and operating inside the 5¿6 GHz ISM band. Antenna fabrication is based on wafer-level chip-scale packaging (WLCSP) techniques and consists of two adhesively bonded glass wafers with patterned metallization and through-wafer electrical interconnects. Via formation in glass substrates is identified as the key fabrication step. Various options for via formation are compared and from these, a 193 nm excimer laser ablation is selected for fabrication of the antenna demonstrator. The fabricated antenna has dimensions of 4 mm × 4 mm × 1 mm, measured operating frequency of 5.05 GHz with a bandwidth of 200 MHz at the return loss of ¿10 dB and a simulated radiation efficiency of 60% were achieved. Keywords: Chip-size antenna; Wafer-level packaging; Wireless microsystem; Excimer laser ablation; Via fabrication
Original languageUndefined/Unknown
Pages (from-to)217-222
Number of pages6
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Issue number2
Publication statusPublished - 2006


  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

Cite this