Original language | English |
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Title of host publication | Cleanroom Technology Forum Proceedings |
Place of Publication | San Jose, CA, USA |
Publisher | Canon Communications, Inc. |
Pages | 11-22 |
Number of pages | 12 |
Publication status | Published - Oct 1991 |
Integrated Cleanroom Concept Developments
P Luscuere, John M Tummers*, Ad Einden vd
*Corresponding author for this work
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Professional