Original language | English |
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Title of host publication | Micromachining Techniques for Fabrication of Micro and Nano Structures |
Editors | M Kahrizi |
Place of Publication | Rijeka |
Publisher | Intech |
Pages | 253-276 |
Number of pages | 300 |
ISBN (Print) | 978-953-307-906-6 |
DOIs | |
Publication status | Published - 2012 |
Keywords
- authored books
- Boekdeel internat.wet