Integrated MEMS: Opportunities & Challenges

Research output: Chapter in Book/Conference proceedings/Edited volumeChapterScientific

Original languageEnglish
Title of host publicationMicromachining Techniques for Fabrication of Micro and Nano Structures
EditorsM Kahrizi
Place of PublicationRijeka
PublisherIntech
Pages253-276
Number of pages300
ISBN (Print)978-953-307-906-6
DOIs
Publication statusPublished - 2012

Keywords

  • authored books
  • Boekdeel internat.wet

Cite this