Integrated MEMS: Opportunities & Challenges

Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific

Original language	English
Title of host publication	Micromachining Techniques for Fabrication of Micro and Nano Structures
Editors	M Kahrizi
Place of Publication	Rijeka
Publisher	Intech
Pages	253-276
Number of pages	300
ISBN (Print)	978-953-307-906-6
DOIs	https://doi.org/10.5772/31493
Publication status	Published - 2012

Keywords

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title = "Integrated MEMS: Opportunities & Challenges",

keywords = "authored books, Boekdeel internat.wet",

author = "PJ French and PM Sarro",

year = "2012",

doi = "10.5772/31493",

language = "English",

isbn = "978-953-307-906-6",

pages = "253--276",

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booktitle = "Micromachining Techniques for Fabrication of Micro and Nano Structures",

publisher = "Intech",

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TY - CHAP

T1 - Integrated MEMS: Opportunities & Challenges

AU - French, PJ

AU - Sarro, PM

PY - 2012

Y1 - 2012

KW - authored books

KW - Boekdeel internat.wet

U2 - 10.5772/31493

DO - 10.5772/31493

M3 - Chapter

SN - 978-953-307-906-6

SP - 253

EP - 276

BT - Micromachining Techniques for Fabrication of Micro and Nano Structures

A2 - Kahrizi, M

PB - Intech

CY - Rijeka

ER -