Integrated Multi-electron-beam blanker array for sub-10-nm electron beam induced deposition

Y Zhang, CTH Heerkens, MJ van Bruggen, P Kruit

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	2857-2860
Number of pages	4
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	24
Issue number	6
Publication status	Published - 2006

Keywords

@article{95206e8b426249a3b0c1ca9ea0816028,

title = "Integrated Multi-electron-beam blanker array for sub-10-nm electron beam induced deposition",

keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "Y Zhang and CTH Heerkens and {van Bruggen}, MJ and P Kruit",

year = "2006",

language = "Undefined/Unknown",

volume = "24",

pages = "2857--2860",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "6",

}

TY - JOUR

T1 - Integrated Multi-electron-beam blanker array for sub-10-nm electron beam induced deposition

AU - Zhang, Y

AU - Heerkens, CTH

AU - van Bruggen, MJ

AU - Kruit, P

PY - 2006

Y1 - 2006

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 1071-1023

VL - 24

SP - 2857

EP - 2860

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - 6

ER -