J.P. Hoogenboom (Inventor), Sander den Hoedt (Inventor)
Research output: Patent
Research output per year
}
TY - PAT
T1 - Integrated optical and charged particle inspection apparatus
AU - Hoogenboom, J.P.
AU - den Hoedt, Sander
N1 - Patent: OCT-19-016 Applicant: Delmic
PY - 2020
Y1 - 2020
M3 - Patent
ER -