Research output per year
Research output per year
| Original language | English |
|---|---|
| Patent number | US 11742173 B2 |
| IPC | H01J |
| Priority date | 24/09/20 |
| Publication status | Published - 2023 |
Bibliographical note
Patent: OCT-19-016Applicant: DELMIC B.V.
Research output
- 1 Patent
-
Integrated optical and charged particle inspection apparatus
Hoogenboom, J. P. & den Hoedt, S., 2020, IPC No. H01J, Priority date 18 Mar 2019, Priority No. WO 2020190136 A1Research output: Patent