Integrated optomechanical arrays of two high reflectivity SiN membranes

Claus Gärtner, João P. Moura, Wouter Haaxman, Richard A. Norte, Simon Groblacher*

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

56 Citations (Scopus)
132 Downloads (Pure)


Multielement cavity optomechanics constitutes a direction to observe novel effects with mechanical resonators. Several exciting ideas include superradiance, increased optomechanical coupling, and quantum effects between distinct mechanical modes among others. Realizing these experiments has so far been difficult, because of the need for extremely precise positioning of the elements relative to one another due to the high-reflectivity required for each element. Here we overcome this challenge and present the fabrication of monolithic arrays of two highly reflective mechanical resonators in a single chip. We characterize the optical spectra and losses of these 200 μm long Fabry-Pérot interferometers, measuring finesse values of up to 220. In addition, we observe an enhancement of the coupling rate between the cavity field and the mechanical center-of-mass mode compared to the single membrane case. Further enhancements in coupling with these devices are predicted, potentially reaching the single-photon strong coupling regime, giving these integrated structures an exciting prospect for future multimode quantum experiments.

Original languageEnglish
Pages (from-to)7171-7175
JournalNano Letters
Issue number11
Publication statusPublished - 2018


  • mechanical arrays
  • mechanical resonators
  • optical filters
  • Optomechanics
  • photonic crystals


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