Integrated piezoresistive force and position detection sensors for micro-handling applications

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	1310-1326
Number of pages	17
Journal	IEEE Journal of Microelectromechanical Systems
Volume	22
Issue number	6
DOIs	https://doi.org/10.1109/JMEMS.2013.2259142
Publication status	Published - 2013

harvest

Keywords

@article{909ced7c3c614eb6a737bb815599dfcd,

title = "Integrated piezoresistive force and position detection sensors for micro-handling applications",

keywords = "CWTS 0.75 <= JFIS < 2.00",

author = "J Wei and M Porta and M Tichem and U Staufer and PM Sarro",

note = "harvest",

year = "2013",

doi = "10.1109/JMEMS.2013.2259142",

language = "English",

volume = "22",

pages = "1310--1326",

journal = "IEEE Journal of Microelectromechanical Systems",

issn = "1057-7157",

publisher = "IEEE",

number = "6",

}

TY - JOUR

T1 - Integrated piezoresistive force and position detection sensors for micro-handling applications

AU - Wei, J

AU - Porta, M

AU - Tichem, M

AU - Staufer, U

AU - Sarro, PM

N1 - harvest

PY - 2013

Y1 - 2013

KW - CWTS 0.75 <= JFIS < 2.00

U2 - 10.1109/JMEMS.2013.2259142

DO - 10.1109/JMEMS.2013.2259142

M3 - Article

SN - 1057-7157

VL - 22

SP - 1310

EP - 1326

JO - IEEE Journal of Microelectromechanical Systems

JF - IEEE Journal of Microelectromechanical Systems

IS - 6

ER -