Integrated piezoresistive force and position detection sensors for micro-handling applications

J Wei, M Porta, M Tichem, U Staufer, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

10 Citations (Scopus)
Original languageEnglish
Pages (from-to)1310-1326
Number of pages17
JournalIEEE Journal of Microelectromechanical Systems
Volume22
Issue number6
DOIs
Publication statusPublished - 2013

Keywords

  • CWTS 0.75 <= JFIS < 2.00

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