Integrated silicon-polymer laterally stacked bender for sensing microgrippers

T Chu Duc; J Wei; PM Sarro; GK Lau

Integrated silicon-polymer laterally stacked bender for sensing microgrippers

T Chu Duc, J Wei, PM Sarro, GK Lau

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

6 Citations (Scopus)

Abstract

This paper presents a novel electro-thermal microgripper based on integrated silicon-polymer laterally stacked microactuators. The device consists of a serpentine-shape deep silicon structure with a thin film aluminum heater on the top and filling polymer in the trenches among the vertical silicon parts. The fabrication is based on deep reactive ion etching of silicon, aluminum sputtering and SU8 filling. The actuator is 500 µm long, 65 µm wide and 50 µm high. The microgripper generates a large motion up to 52 µm at a driving voltage of only 2 V and with a power consumption of 50 mW. The maximum working temperature is 164 degrees Centigrade at 2 V.

Original language	Undefined/Unknown
Title of host publication	Proceedings of the 5th IEEE Conference on Sensors
Editors	Sukhan Lee, Masayoshi Esashi
Publisher	IEEE
Pages	662-665
Number of pages	4
ISBN (Print)	1-4244-0376-6
Publication status	Published - 2006
Event	IEEE Sensors 2006: 5th IEEE Conference on Sensors - Daegu, Korea, Republic of Duration: 22 Oct 2006 → 25 Oct 2006 Conference number: 5

Publication series

Name
Publisher	IEEE

Conference

Conference	IEEE Sensors 2006
Country/Territory	Korea, Republic of
City	Daegu
Period	22/10/06 → 25/10/06

Bibliographical note

Niet eerder opgevoerd

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{ecf22cd448c64d3c8ecbcef6b691ca20,

title = "Integrated silicon-polymer laterally stacked bender for sensing microgrippers",

abstract = "This paper presents a novel electro-thermal microgripper based on integrated silicon-polymer laterally stacked microactuators. The device consists of a serpentine-shape deep silicon structure with a thin film aluminum heater on the top and filling polymer in the trenches among the vertical silicon parts. The fabrication is based on deep reactive ion etching of silicon, aluminum sputtering and SU8 filling. The actuator is 500 µm long, 65 µm wide and 50 µm high. The microgripper generates a large motion up to 52 µm at a driving voltage of only 2 V and with a power consumption of 50 mW. The maximum working temperature is 164 degrees Centigrade at 2 V.",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "{Chu Duc}, T and J Wei and PM Sarro and GK Lau",

note = "Niet eerder opgevoerd; IEEE Sensors 2006 ; Conference date: 22-10-2006 Through 25-10-2006",

year = "2006",

language = "Undefined/Unknown",

isbn = "1-4244-0376-6",

publisher = "IEEE",

pages = "662--665",

editor = "{Sukhan Lee} and {Masayoshi Esashi}",

booktitle = "Proceedings of the 5th IEEE Conference on Sensors",

address = "United States",

}

TY - GEN

T1 - Integrated silicon-polymer laterally stacked bender for sensing microgrippers

AU - Chu Duc, T

AU - Wei, J

AU - Sarro, PM

AU - Lau, GK

N1 - Conference code: 5

PY - 2006

Y1 - 2006

N2 - This paper presents a novel electro-thermal microgripper based on integrated silicon-polymer laterally stacked microactuators. The device consists of a serpentine-shape deep silicon structure with a thin film aluminum heater on the top and filling polymer in the trenches among the vertical silicon parts. The fabrication is based on deep reactive ion etching of silicon, aluminum sputtering and SU8 filling. The actuator is 500 µm long, 65 µm wide and 50 µm high. The microgripper generates a large motion up to 52 µm at a driving voltage of only 2 V and with a power consumption of 50 mW. The maximum working temperature is 164 degrees Centigrade at 2 V.

AB - This paper presents a novel electro-thermal microgripper based on integrated silicon-polymer laterally stacked microactuators. The device consists of a serpentine-shape deep silicon structure with a thin film aluminum heater on the top and filling polymer in the trenches among the vertical silicon parts. The fabrication is based on deep reactive ion etching of silicon, aluminum sputtering and SU8 filling. The actuator is 500 µm long, 65 µm wide and 50 µm high. The microgripper generates a large motion up to 52 µm at a driving voltage of only 2 V and with a power consumption of 50 mW. The maximum working temperature is 164 degrees Centigrade at 2 V.

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 1-4244-0376-6

SP - 662

EP - 665

BT - Proceedings of the 5th IEEE Conference on Sensors

A2 - Sukhan Lee, null

A2 - Masayoshi Esashi, null

PB - IEEE

T2 - IEEE Sensors 2006

Y2 - 22 October 2006 through 25 October 2006

ER -