Abstract
This paper presents a novel electro-thermal microgripper based on integrated silicon-polymer laterally stacked microactuators. The device consists of a serpentine-shape deep silicon structure with a thin film aluminum heater on the top and filling polymer in the trenches among the vertical silicon parts. The fabrication is based on deep reactive ion etching of silicon, aluminum sputtering and SU8 filling. The actuator is 500 µm long, 65 µm wide and 50 µm high. The microgripper generates a large motion up to 52 µm at a driving voltage of only 2 V and with a power consumption of 50 mW. The maximum working temperature is 164 degrees Centigrade at 2 V.
Original language | Undefined/Unknown |
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Title of host publication | Proceedings of the 5th IEEE Conference on Sensors |
Editors | Sukhan Lee, Masayoshi Esashi |
Publisher | IEEE |
Pages | 662-665 |
Number of pages | 4 |
ISBN (Print) | 1-4244-0376-6 |
Publication status | Published - 2006 |
Event | IEEE Sensors 2006: 5th IEEE Conference on Sensors - Daegu, Korea, Republic of Duration: 22 Oct 2006 → 25 Oct 2006 Conference number: 5 |
Publication series
Name | |
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Publisher | IEEE |
Conference
Conference | IEEE Sensors 2006 |
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Country/Territory | Korea, Republic of |
City | Daegu |
Period | 22/10/06 → 25/10/06 |
Bibliographical note
Niet eerder opgevoerdKeywords
- conference contrib. refereed
- Conf.proc. > 3 pag