Integrating carbon nanotubes as vias in a monolithic 3DIC process

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	Proc. International Conference on Solid State Devices and Materials (SSDM 2012)
Pages	1170-1171
Number of pages	2
Publication status	Published - 2012

Keywords

@inproceedings{f26a3b95564a401aa06cca5c80bc8635,

title = "Integrating carbon nanotubes as vias in a monolithic 3DIC process",

keywords = "Geen BTA classificatie",

author = "S Vollebregt and R Ishihara and AN Chiaramonti and {van der Cingel}, J and CIM Beenakker",

year = "2012",

language = "English",

pages = "1170--1171",

booktitle = "Proc. International Conference on Solid State Devices and Materials (SSDM 2012)",

}