Integrating low temperature aligned carbon nanotubes as vertical interconnects in Si technology

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

20 Citations (Scopus)
Original languageEnglish
Title of host publication11th IEEE International Conference on Nanotechnology (NANO 2011)
EditorsJE Morris, S Rung, S Goodnick
Place of PublicationPortland, OR, USA
PublisherIEEE Society
Pages985-990
Number of pages6
ISBN (Print)978-1-4577-1515-0
DOIs
Publication statusPublished - 2011
Event11th IEEE NANO 2011 - Portland, OR, USA
Duration: 15 Aug 201119 Aug 2011

Publication series

Name
PublisherIEEE

Conference

Conference11th IEEE NANO 2011
Period15/08/1119/08/11

Keywords

  • Conf.proc. > 3 pag

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