Integrating low-temperature carbon nanotubes as vertical interconnects in Si technology

Research output: Chapter in Book/Conference proceedings/Edited volumeChapterScientific

Original languageEnglish
Title of host publicationNanoelectronic Device Applications Handbook
EditorsJE Morris, I Krzysztof
Place of PublicationBoca Raton, FL, USA
PublisherCRC Press
Pages423-436
Number of pages940
ISBN (Print)9781466565234
Publication statusPublished - 2013

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