Integration of a fabrication process for an aluminum single-electron transistor and a scanning force probe for tuning-fork-based probe microscopy

K Suter, T Akiyama, NF de Rooij, M Huefner, U Staufer

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)
Original languageEnglish
Pages (from-to)1088-1097
Number of pages10
JournalIEEE Journal of Microelectromechanical Systems
Volume19
Issue number5
Publication statusPublished - 2010

Keywords

  • professional journal papers
  • CWTS JFIS >= 2.00

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