@article{e650bf0d12e84a6f928e4f0d0b6c4374,
title = "Integration of a fabrication process for an aluminum single-electron transistor and a scanning force probe for tuning-fork-based probe microscopy",
keywords = "professional journal papers, CWTS JFIS >= 2.00",
author = "K Suter and T Akiyama and {de Rooij}, NF and M Huefner and U Staufer",
year = "2010",
language = "English",
volume = "19",
pages = "1088--1097",
journal = "IEEE Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "Institute of Electrical and Electronics Engineers (IEEE)",
number = "5",
}