@inproceedings{2138a7090f09487aa751343ad68dd9c7,
title = "Integration of expanding thermal plasma deposited hydrogenated amorphous silicon in solar cells",
keywords = "Conf.proc. > 3 pag",
author = "BA Korevaar and C Smit and AMHN Petit and RACMM Swaaij and {van de Sanden}, MCM",
note = "niet eerder opgevoerd; Amorphous and heterogeneous silicon-based films - 2002, San Francisco, CA. USA ; Conference date: 02-04-2002 Through 05-04-2003",
year = "2002",
language = "Undefined/Unknown",
isbn = "1-55899-651-6",
publisher = "Material Research Society",
pages = "1--5",
editor = "JD Cohen and JR Abelson and H Matsumura and J Robertson",
booktitle = "Materials Research Society symposium proceedings amorphous and hetrogeneous silicon-based films - 2002",
}