Integration of MEMS devices

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Electronics and structures for MEMS (Proceedings of SPIE 3891)
Editors	NW Bergmann, O Reinhold, NC Tien
Place of Publication	Bellingham
Publisher	International Society for Optical Engineering
Pages	39-48
Number of pages	10
ISBN (Print)	0-8194-3492-2
Publication status	Published - 1999
Event	Conference on Electronics and Structures for MEMS, Queensland - Bellingham Duration: 27 Oct 1999 → 29 Oct 1999

Name
Publisher	International Society for Optical Engineering

Conference	Conference on Electronics and Structures for MEMS, Queensland
Period	27/10/99 → 29/10/99

Keywords

@inproceedings{7a66e14a26e1449b83d3df9eca681855,

title = "Integration of MEMS devices",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "PJ French",

year = "1999",

language = "Undefined/Unknown",

isbn = "0-8194-3492-2",

publisher = "International Society for Optical Engineering",

pages = "39--48",

editor = "{NW Bergmann} and {O Reinhold} and {NC Tien}",

booktitle = "Electronics and structures for MEMS (Proceedings of SPIE 3891)",

note = "Conference on Electronics and Structures for MEMS, Queensland ; Conference date: 27-10-1999 Through 29-10-1999",

}

TY - GEN

T1 - Integration of MEMS devices

AU - French, PJ

PY - 1999

Y1 - 1999

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 0-8194-3492-2

SP - 39

EP - 48

BT - Electronics and structures for MEMS (Proceedings of SPIE 3891)

A2 - NW Bergmann, null

A2 - O Reinhold, null

A2 - NC Tien, null

PB - International Society for Optical Engineering

CY - Bellingham

T2 - Conference on Electronics and Structures for MEMS, Queensland

Y2 - 27 October 1999 through 29 October 1999

ER -