Integration of silicon MEMS devices: materials and processing considerations

Research output: Contribution to journal › Article › Scientific

Keywords

@article{50534ddfc0e9428cb7edeaa96f7cc90b,

title = "Integration of silicon MEMS devices: materials and processing considerations",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "PJ French",

year = "2001",

language = "Undefined/Unknown",

pages = "7--13",

journal = "Smart Materials Bulletin",

issn = "1471-3918",

publisher = "Elsevier",

}