Interaction of deuterium with SIMOX buried oxide

A Rivera, A van Veen, H Schut, JMM de Nijs, P Balk

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageUndefined/Unknown
    Pages (from-to)497-501
    Number of pages5
    JournalMicroelectronic Engineering
    Volume2001
    Issue number59
    Publication statusPublished - 2002

    Keywords

    • ZX Int.klas.verslagjaar < 2002

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