Interactive effects in reactive ion etching of W1-xGex

EWJM van der Drift, BQ Dinh, PA Verhoeven, EJM Fakkeldij, T Zijlstra

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)
Original languageUndefined/Unknown
Pages (from-to)2676-2681
Number of pages6
JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Publication statusPublished - 1997

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